Low On-State Voltage and EMI Noise 4H-SiC IGBT With Self-Biased Split-Gate pMOS

Abstract

A 15-kV-scale 4H-SiC insulated-gate bipolar transistor (IGBT) with a self-biased split-gate pMOS (SGPMOS) is proposed and simulated in this work. By introducing the SGPMOS, the proposed IGBT forms a hole barrier in the ON-state and a hole extraction path during the turn-on and turn-off transient, respectively. Compared to GS IGBT, the ON-state voltage ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}_{\text {ON}}{)}$ </tex-math></inline-formula> of the SGPMOS IGBT is decreased by 54.95% for the same turn-off loss ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${E}_{\text {off}}$ </tex-math></inline-formula> ). Meanwhile, compared with pMOS IGBT, the <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${C}$ </tex-math></inline-formula> – <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}$ </tex-math></inline-formula> and gate charge ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${Q}_{g}{)}$ </tex-math></inline-formula> characteristics exhibit that the Miller capacitance ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${C}_{\text {gc}}{)}$ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${Q}_{g}$ </tex-math></inline-formula> of the SGPMOS IGBT are reduced by 56.60% and 35.85%, respectively. Moreover, SGPMOS can extract the hole accumulated both under the gate oxide and in the P-shield region during the turn-on transient. This diminishes reverse displacement current ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${I}_{G\_{}{\text {dis}}}{)}$ </tex-math></inline-formula> , contributing to low electromagnetic interference (EMI) noise. Simulation results demonstrate that, compared to pMOS IGBT, the SGPMOS IGBT achieves better controllability in peak turn-on current ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${I}_{\text {max}}{)}$ </tex-math></inline-formula> and turn-on <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{d}{I}_{C}/\text{d}{t}$ </tex-math></inline-formula> , featuring a 52.75% lower maximum reverse recovery <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{d}{V}_{\text {KA}}/\text{d}{t}$ </tex-math></inline-formula> for the same turn-on loss ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${E}_{\text {on}}{)}$ </tex-math></inline-formula> .