Abstract
The effects of low-energy electron irradiation (10–50 eV, up to ∼2×1017 e cm−2) on thin films of poly(methyl methacrylate) (PMMA), deposited on air-exposed Al, have been studied in situ as a function of temperature (∼200–300 K) using polarization-modulated infrared reflection absorption spectroscopy. Near 300 K damage is seen in the form of a loss of material, as shown by a decrease in the intensity of the entire PMMA spectrum. At low temperature, in addition to damage, evidence is seen for a radiation-induced change in chain configuration leading to an increased interaction between ester groups and the Al surface. This configuration is unstable and is removed by annealing to ∼300 K.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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