Low cost dual axis micro force sensor for robotic manipulations

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A multi-dimensional force measurement device often plays an important role in micro robotic manipulations. Due to the high level required accuracy and physical dimensions of the sensors, they are normally fabricated through a series of MEMS process which makes the sensors not only prohibitive but also vulnerable to an excessive loading operation environment. In this article, an inexpensive force measurement using strain gauges is developed and tested. Combining a mechanical structure optimization and signal processing technique, the present work provides a fairly precise force measurement in sub-micron Newton scale. In addition, the developed concept is expanded to a dual axis force measurement which extends its application to the micro particle robotic manipulations.