Low aberration in-lens analyzer for e-beam tester using collimation by both magnetic and electrostatic lenses

Abstract

We have explored ways to reduce aberration in lens collimation (LC)-type in-lens analyzers for e-beam testers used to probe submicon interconnections of LSI's. To reduce the chromatic aberration, the magnetic field distribution width is reduced, shortening its focal length. Also, a new magnetic and electrostatic lens collimation (MELC) analyzer was devised to ensure a voltage measurement accuracy of 0.3 V for interconnections with 0.5 μm line and space. A beam diameter of 0.15 μm was also achieved at a current of 1 nA.