Abstract
Metal electrode structures for biosensors with a high spatial density and nm gaps have been produced using focused megaelectronvolt (MeV) proton beam writingof poly-(methyl methacrylate) positive resist combined with metal lift-off. The minimalproximity exposure and straight proton trajectories in ( nm) resist layers for focused MeV proton beam writing are strongly indicativethat ultimate electrode gap widths approaching a few nanometres are achievable.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
