Abstract
In recent years, focused ion beam (FIB) processing has been developed into a well-established and promising technique in nearly all fields of nanotechnology for patterning and prototyping on the μm-scale and below. Liquid metal alloy ion sources (LMAIS) represent a promising alternative to expand the FIB application fields besides all other source concepts. The need of light elements like Li was investigated using various alloys. A promising candidate is a Ga35Bi60Li5 based LMAIS, which is introduced in more detail and which operates stably for more than 1000 μA h. It enables a highly resolved imaging with (4.0 ± 0.6) nm edge resolution (20%–80%) and patterning using Li, Ga, or heavy polyatomic Bi clusters, all coming from one ion source.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
