Abstract

Characteristics of AuSi liquid metal alloy ion source with single and coupling (double) extractor electrodes have been investigated both in the focused ion beam machine, and in the vacuum test bed system equipped with quadrupole mass spectrometer. Liquid metal ion source with coupling extractor electrode produce a stable total ion current which increases almost linearly when compared with a single extractor electrode. The isotope current of 197Au+ observed with quadrupole mass spectrometer is higher in the ion source with coupling extractor electrode than in a single extractor electrode, nonetheless, the pattern of its current–voltage characteristics remain the same for both single and coupling extractor electrodes. However, for lighter isotopes such as 28Si+ and 28Si++, the result is reversed (higher in ion source with single extractor electrode). The secondary electron image of copper grid pictures obtained from focused ion beam systems installed with an AuSi liquid metal alloy ion source with single and coupling extractor electrodes remain the same.

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