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Abstract
In spite of the fact that a great deal of research has been carried out on liquid metal ion sources, surprisingly few results exist on the temperature dependence of their emission characteristics. In this article we study two liquid metal alloy ion sources (LMAISs), namely Co36Nd64 and Au77Ge14Si9. While the results of the former source were as expected, the latter displayed an entirely different dependence of its emission characteristics on temperature. The unusual results of the Au77Ge14Si9 LMAIS are explained in terms of the abnormal behavior of the surface tension of the alloy with temperature.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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