Abstract
Most of the currently existing laser methods for separating plates into crystals have been analyzed. A method for eliminating overheating of the substrate, its melt, modification and release of material to the surface is proposed — local laser plasma-chemical etching on the example of polycrystalline diamond and monocrystalline sapphire. Operating pressure range 6•10-4...1•10-1 Torr.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have