Abstract
We experimentally present an acousto-optic Q-switched, side-pumped laser generating the watt-level deep-ultraviolet (DUV) output at 266 nm. A quasi-enhanced cavity, containing a BBO crystal as the fourth harmonic generator, was employed in the compact DUV laser system. A DUV laser with the average power of 1.08 W was achieved after careful alignment of the resonator. Our experimental results demonstrated that the DUV power was very sensitive to the misalignment of a cavity mirror. It was attributed to the thermal effect in BK7 mirror induced by high green power, by which the beam radius of green light was compressed in the compound resonator.
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