Abstract
At present, deep ultraviolet (DUV) lasers at the wavelength of fourth harmonics of 1 μm (266 nm/258 nm) and at the wavelength of 193 nm are widely utilized in science and industry. We review the generation of these DUV lasers by nonlinear frequency conversion processes using solid-state/fiber lasers as the fundamental frequency. A DUV laser at 258 nm by fourth harmonics generation (FHG) could achieve an average power of 10 W with a beam quality of M2 < 1.5. Moreover, 1 W of average power at 193 nm was obtained by sum-frequency generation (SFG). A new concept of 193-nm DUV laser generation by use of the diamond Raman laser is also introduced. A proof-of-principle experiment of the diamond Raman laser is reported with the conversion efficiency of 23% from the pump to the second Stokes wavelength, which implies the potential to generate a higher power 193 nm DUV laser in the future.
Highlights
Deep ultraviolet (DUV) lasers are currently widely employed in various applications
A DUV laser at 260 nm has been applied as an “external seed” of a free-electron laser (FEL) with output wavelengths as short as 4.3 nm, which would make it possible to do the scientific research beyond the carbon K-edge [1]
Coherent radiation in the vacuum ultraviolet (VUV) region was generated with a wavelength as short as 121 nm in strontium tetra borate (SBO) by “random quasi-phase matching” (RQPM), which was the shortest wavelength generated by second-order nonlinear optical process in a solid-state material [37]
Summary
Deep ultraviolet (DUV) lasers are currently widely employed in various applications. For instance, a DUV laser at 260 nm has been applied as an “external seed” of a free-electron laser (FEL) with output wavelengths as short as 4.3 nm, which would make it possible to do the scientific research beyond the carbon K-edge [1]. With the fast development of the solid-state lasers and the nonlinear optical crystals, high-power DUV lasers at 266 nm/258 nm have been studied by many research groups fruitfully [3,4,5,6,7,8,9,10,11,12,13,14,15,16,17]. The highest average output power of these DUV lasers was 40 W at the wavelength of 266 nm, of which the fundamental light was a high-power Nd:Y3 Al5 O12 (Nd:YAG) laser at 1064 nm and the nonlinear optical crystal was a CsLiB6 O10. High coherence could be obtained same time, which consists of a solid-state DUV laser seed and an ArF excimer amplifier [2]. New concept of the 193-nm DUV laser generation is presented based on the diamond Raman laser
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