Abstract
We report a 10kHz, 10.5W deep ultraviolet (DUV) laser at 258nm with a pulse duration of 3ns by fourth-harmonic generation (FHG) in a CsLiB6O10 crystal with high-conversion efficiency. The fundamental laser is at 1030nm with 35W output power consisting of a Yb:YAG ceramics thin rod amplifier. The M2 of the DUV laser was confirmed to be <1.5. To the best of our knowledge, this is the best beam quality for DUV laser power higher than 10W generated by FHG of a solid-state laser, as well as the highest conversion efficiency of 31% from infrared to DUV so far.
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