Tunable, Continuous-Wave, Deep-Ultraviolet Laser Generation by Intracavity Frequency Doubling of Visible Fiber Lasers

Abstract

Deep ultraviolet (DUV) lasers are essential elements to versatile applications such as spectroscopy and lithography, and several techniques including free-electron lasers, excimer lasers and high-order harmonic conversion have been developed for DUV laser generation, yet the wavelength tunability and compactness are still challenging. Here, for the first time, we experimentally demonstrate a compact tunable continuous-wave (CW) DUV laser source by direct intracavity frequency doubling of visible fiber lasers. Efficient green/yellow laser emission is enabled by the down-conversion in the Ho <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$^{3+}$</tex-math></inline-formula> - or Dy <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$^{3+}$</tex-math></inline-formula> -doped ZBLAN fibers while the miniaturized cavity consists of a home-made fiber pigtail mirror and diffraction grating. The second harmonic generation from visible to ultraviolet is subsequently implemented by utilizing a BBO module intracavity. The achieved CW DUV lasers yield wavelength tuning range of 269.5-275.4 nm and 283.6-289.9 nm in the presence of an ultra-narrow linewidth of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$&lt; $</tex-math></inline-formula> 0.025 nm. The produced power at 272.6 nm reaches 1.36 mW and a maximum visible-to-DUV efficiency of 5.3‰ is estimated with the green laser excitation. Our work therefore provides new possibilities for the realization of a new class of compact, wavelength tunable, and cost-effective CW DUV laser sources.