Large-area diamond thin film on Q-carbon coated crystalline sapphire by HFCVD

Abstract

The growth of diamond on transparent substrates like sapphire presents a great challenge because of the large thermal misfit between the film and the substrate, absence of any carbide layer during diamond growth, and low nucleation density during chemical vapor deposition (CVD) growth process. In this study, we report on the use and the role of Q-carbon as an intermediate layer to successfully deposit large-area diamond film on c-sapphire by hot filament chemical vapor deposition (HFCVD). The Q-carbon consists of very high-density diamond tetrahedra which act as the embryo for diamond nucleation. Different techniques such as X-ray diffraction, scanning electron microscopy, and Raman spectroscopy show that continuous diamond films with good crystallinity and without any impurity phase can be deposited on the Q-carbon coated single crystal sapphire substrate. The Q-carbon layer is very adherent and it negates the thermal mismatch between the diamond film and the sapphire substrate. A small blue shift in the Raman peak of the diamond from its equilibrium position suggests the deposition of the CVD diamond film with minimal stress (1.14 GPa). This technique of growing large-area continuous diamond thin film with excellent crystalline quality on a single crystal sapphire substrate can serve as a platform for the development of next-generation corrosion and erosion resistant infrared windows, state-of-the-art optoelectronic devices, and advanced scanning probe microscopy systems.