Abstract
In this investigation, diamond thin films with grain size ranging from 50 nm to 1 µm deposited using hot filament chemical vapor deposition (HFCVD) have been analyzed by elastic recoil detection analysis (ERDA) for determining hydrogen concentration. Hydrogen concentration in diamond thin films increases with decreasing grain size. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) results showed that part of this hydrogen is bonded to carbon forming C–H bonding. Raman spectra also indicated the increase of non diamond phase with the decrease in crystallite size. Incorporation of hydrogen in the samples and increase of hydrogen content in nanocrystalline sample are discussed. Large separation between filament and substrate used for the synthesis of nanocrystalline film helped to understand the large incorporation of hydrogen in nanocrystalline diamond films during growth. The study addresses the hydrogen trapping in different samples and higher hydrogen concentration in nanocrystallites by considering the synthesis conditions, growth mechanisms for different grain sized diamond films and from the quality of CVD diamond films.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
