Abstract
The growth of an epitaxial film with a large lattice misfit to substrates is interpreted as domain growth with domain matching by the coincidence site lattice (CSL), in which it is assumed that (m×n) film lattice units are superimposed on (k×l) substrate lattice units. The domain matching with all combinations of two lattice units was expanded on a polar coordinate system (polar CSL figure), where the radius and angle are indicative of the domain size and the lateral angle between two superimposed lattices, respectively. The polar CSL figure enable us to visualize the domain matching of all combinations between the two lattice units (k×l) and (m×n). The cubic-on-cubic growth of magnesium oxide on a silicon substrate and the lateral rotation of bismuth cuprate oxide were taken as examples of visualization using the polar CSL figure.
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