Growth of Nanocubic MgO on Silicon Substrate by Pulsed Laser Deposition

Abstract

Magnesium oxide (MgO) prepared by both pulsed laser deposition and sputtering methods showed constriction of lattice constants. To emphasize the effect of the constriction of lattice constants, MgO prepared at high oxygen atmosphere and high substrate temperature, resulted in the growth of cubic-shaped magnesium oxide (MgO) nanoparticles on a Si substrate. In oxygen atmosphere, the nanocubic MgO was scattered on the substrate without the Si surface being covered by a MgO thin film. Interestingly, the growth of nanocubic MgO was restrained on the samples prepared in nitrogen atmosphere. The formation of nanocubic MgO is related to the deposition pressure as well as the etching effect provided by oxygen atmosphere.