Abstract

We have investigated the effect of extensive compositional change on the structure and magnetic properties of FePt sputtered films deposited at a substrate temperature of 300 °C. The Fe concentration in the FePt films was varied from 19 to 68 at. %. In the x-ray diffraction patterns, (001) and (003) superlattice peaks were observed at a Pt-rich composition range, indicating the formation of a L10 ordered structure. A L10 ordered Fe38Pt62 film exhibited perpendicular magnetization with a large uniaxial magnetic anisotropy of Ku=1.8×107 erg/cm3.

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