Ionization gas sensing in a microelectrode system with carbon nanotubes

Abstract

An efficient technology for manufacturing high-performance ionization gas sensors using carbon nanotubes as electrode materials that identify gases in some short sampling distance is developed in this letter. The microarray with five sensor units of different gap sizes (S≈6, 7, 8, 10, and 12μm) can break down gases at distinct threshold voltages and currents depending on the gap size and gas species. The quite low operation voltage, high accuracy, and chip-based nature may be considered as significant improvements in ionization gas sensors.