Abstract

A high-performance NO gas sensor was prepared by inducing thermal fluorination of carbon nanotube semiconductors. Thermal fluorination of multi-walled carbon nanotubes (MWCNTs) was carried out at various temperatures (100 ∼ 1000 °C) to investigate the effects of the reaction temperature. The mechanism of high-performance NO gas sensor electrode was shown to depend on the fluorination temperature in a way that can be divided into three regions, separated at 400 and 1000 °C. In the first temperature region, the induction of fluorine functional groups onto MWCNTs showed the opposite trend in electrical resistance change comparing with traditional p-type MWCNTs. In the second temperature region, the induced fluorine functional groups were attenuated by generated fluorinated carbon gases resulting in the decomposition of MWCNTs and the recovery of traditional p-type gas sensor behavior. In the highest temperature region above 1000 °C, reoriented carbon structure was observed, showing bent nanotubes produced from destruction by fluorination and subsequent reorientation due to the high temperature. The gas sensing responsiveness was significantly improved by the thermal fluorination, which causes electrophilic attraction, creates adsorption sites for target NO gases and improve hydrophobicity for gas sensing stability in humid condition. In conclusion, a high-performance gas sensor was obtained by thermal-fluorination of MWCNTs.

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