Ion-beam-induced texture formation in vacuum-condensed thin metal films

Abstract

The reorientation of crystallites in vapour-deposited thin metal films under ion bombardment and texture formation induced by ion beams during vacuum condensation are surveyed. Additional experimental evidence for the phenomena is presented. It is shown that a 〈110〉 fibrous texture is formed in vacuum-condensed f.c.c. and h.c.p. metal films during ion bombardment with 10 keV argon ions, irrespective of the initial crystallite orientation. A 〈110〉 texture is also initiated and developed by the growth process in silver films condensed under simultaneous bombardment with 10 keV argon ions. The anisotropy of incident ion penetration and the propagation of impacts in the crystal lattice are considered as the most probable causes of the observed phenomena. The consequences resulting from texture formation in thin films under ion action are also briefly discussed.