Abstract
Ion charge state and impurities extracted from a multicusp ion source have been studied with the use of a magnetic momentum mass analyzer. Impurities contained in high current metal ion beams are crucible materials (such as Al2O3, BN, Y2O3, C) and high melting point materials (such as Mo, Ta, W). To reduce these impurities, the dependence of the impurity on the arc discharge voltage has been investigated experimentally. Amounts of impurities and multicharged ions are decreased with arc discharge voltage. For example, at the arc discharge voltage of 60 V, aluminum ion beam contains 1% impurities and 4% multicharged ions, and at the arc discharge voltage of 20 V, impurities and multicharged ions are less than 1% in all. High-purity single-charged metal ion beams have been obtained.
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