Abstract
This paper reviews high current ion sources suitable for commercial use. Although the production of high currents of a variety of ions is a vital consideration, this paper focuses on other aspects of ion source performance. The modern ion implanter is a major item of expensive capital equipment, with the ion source being its least reliable component. So, the most critical issues today are reliability and lifetime, as well as safety, flexibility, and ease of service. The Freeman ion source has clearly dominated the field, yet a number of alternative sources have found commercial acceptance, including microwave sources. Factors affecting the ultimate usefulness of various sources in different implantation applications are discussed.
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