Abstract
A plasma filament ion source has been developed as a long lifetime ion source for use in ion implanters. In this ion source, a plasma filament replaces a conventional metallic filament used in a Freeman type ion source. This ion source consists of two compartments, i.e. a plasma generator and an ion source chamber interconnected by a tapered narrow duct. The pressure difference between the two parts made by differential pumping prevents the feed gas from flowing into the plasma generator. With any combination of a plasma filament of either argon or neon and a feed gas of either AsF 5 or PF 5, the lifetime was found to be more than 90 h with an extraction voltage of 40 kV and a corresponding ion current density of 20 mA/cm 2; a considerable amount of As + and P + ions were observed in mass spectra. This ion source is eminently suitable for oxygen ion production and useful for realizing a full cryopumping ion implanter system.
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