Abstract
Rutherford backscattering spectrometry has been used to study the effects of ion implantation and thermal annealing on single crystals of YBa 2Cu 3O x . The structural disorder induced by ion implantation results in significant changes in the near-surface composition during subsequent thermal processing. Compositional changes in the near-surface region of the YBa 2Cu 3O x single crystals were observed after annealing oxygen- or copper-implanted crystals at temperatures of 500°C or higher in various atmospheres. Unimplanted crystals are not affected by identical processing conditions. Preliminary results show that sintered polycrystalline ceramic YBa 2Cu 4O x also undergoes compositional changes as a result of ion implantation and thermal annealing.
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