Abstract
A hollow cathode discharge with a Ti cathode and a positively biased ring anode was operated in Ar + N_2 or Ar + O_2 gas mixtures. The energy distribution of plasma ions is investigated with the help of energy-resolved mass spectrometry. Singly and doubly charged Ar^+ and Ar^{2+} ions and molecular N_2^+ or O_2^+ ions are the most abundant ionic species. The kinetic energy of all plasma ions is enhanced by a positive anode voltage.Graphical abstract
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