Abstract
The crystalline quality of high-Tc superconducting HoBa2Cu3Ox thin films formed on MgO(001) has been investigated by a high-energy ion channeling technique. Analysis was performed at 3 depth regions (surface, inside, and interface), and the degree of crystalline quality at each depth was estimated. Based on ion channeling measurements carried out with the normal <001> and off-normal <101> and <011> directions, it has been found that (1) the crystalline quality at the film surface is much better than that at the interface, (2) the crystalline disorder can be seen mainly along the c-axis, and (3) the film consists of two domains, 90° rotated from each other about the c-axis of the film. The crystalline quality of the MgO substrates has also been investigated.
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