Abstract
The crystalline quality (perfection or imperfection) of SrTiO3 substrates and subsequent as-deposited YBa2Cu3Ox superconducting films has been investigated by a high-energy ion channeling technique. Analysis was performed as a function of depth, especially at 3 typical depth regions (surface, inside, interface), to clarify junction ordering features between substrates and films. Based on ion channeling measurements, it has been found that (1) disorders of substrates affect crystalline quality of films greatly at the interface regions, (2) the film reorders over a proper amount of YBa2Cu3Ox disordered layers (as in buffer layers), (3) the film consists of an almost single domain. The crystalline quality of some SrTiO3 substrates widely used in Japan has also been investigated and the common characteristics of distortions along the c-axis have been found.
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