Investigations on macroscopic intrinsic stress in amorphous binary‐alloy films

Abstract

AbstractMacroscopic tensile and compressive mechanical stresses in the film plane are observed during the growth of amorphous binary‐alloy films of ZrCo and TbCo prepared by the condensation of the metal vapours from two electron‐beam evaporators. The mechanical stress is measured by a capacitive cantilever beam technique. Both kinds of stresses are affected by composition and substrate temperature, but the compressive stress additionally depends on the film thickness, evaporation rate and substrate material. The results are discussed in terms of a model for the growth of amorphous films published earlier.