Abstract
A microfabricated cantilever with a lead zirconate titanate (PZT) piezoelectric thin film used as an integrated deflection sensor was applied to dynamic-mode atomic force microscopy (AFM). This probe can be used for scanning near-field optical microscopy (SNOM) and Kelvin-probe force microscopy (KFM). We adopted a frequency modulation (FM) detection method not only to stabilize imaging conditions in dynamic-mode AFM but also to enhance sensitivity for the detection of electrostatic forces in KFM measurement. We investigated local optical and electrical properties of gold and polystyrene nanoparticles dispersed on an indium tin oxide (ITO) substrate. We successfully identified the species of each particle by different contrasts obtained in SNOM and KFM images.
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