Investigation of Thin Films by Using Superminiature Eddy Current Transducers

Abstract

The article describes the results of studies of Ni, Al and Ag ultrathin films obtained by the resistive thermal evaporation method and having the characteristic dimensions of islands of 700–1000 nm with a film thickness of about 500 nm. The research objective was the development of subminiature eddy-current transducer designed for studying thin films. Timeliness is subject to the need to assess and predict safe operation life of products manufactured using thin films. A subminiature surface eddy-current transducer of the transformer type was developed. On the basis of eddy-current transducer, a software and hardware complex was developed to control the eddy-current transducer. The hardware and software complex provided the opportunity to make local studies of the electrical conductivity of non-ferromagnetic thin films by the method of eddy currents. In the course of the study, it was possible to develop an algorithm for finding changes in the average amplitude of the output signal, which allows concluding about the electrical conductivity of the thin film. The results of testing of Al, Ag and Ni films were presented, and the electrical conductivity values of the samples were obtained. The study of the kinetics oxidation of nanofilms oxygen in the air at 25 °C is presented.