Abstract
An anodic vacuum arc deposition device is described that provides a steady arc discharge obtained after ignition in vacuum, which is sustained by metal vapor emitted at a consumable anode. The anode is formed by winding evaporent wire around a tungsten anode; Al was used for evaporation. The preliminary properties of Al arc plasma generated by the anodic vacuum arc are investigated in the current range between 15 and 40 A. Electron temperatures were measured in the range 0.4–0.8 eV and electron density within 10 15–10 17/m 3 at 25 A arc current. Trace anodic element contents in the coatings deposited using two different methods of ignition were investigated with Rutherford Back-scattering Spectrometry. A suitable method of ignition is discussed with respect to the W content in the deposited films.
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