Abstract
To explain the trend of an experimental dependence for concentration of chlorine atoms in a discharge, the principal processes of the formation and decay in the plasma of a chlorine mixture with hydrogen were considered. The rate coefficients and rates of processes involving electrons were calculated by mathematical modeling in order to reveal the contribution of each process to the observed concentration of chlorine atoms. The greatest contribution is made by direct electron-impact dissociation. The experimental concentration of chlorine atoms at a high percentage of hydrogen is explained by an increase in electron concentration and, hence, in the rate of the direct dissociation process. It is suggested that chain reactions can make a substantial contribution to the formation of atoms at low hydrogen concentrations.
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