Abstract

The article considers the results of studying the emission radiation of Ar, Kr, CO2, CHF3, CF4 and N2 gas jets excited by pulsed laser radiation. The shape of the spectral dependence in the spectral range 2.3-4.4 nm and the emission intensity of a number of lines in absolute units were studied. To excite the targets, a Nd : YAG laser, λ=1064 nm, tau=5.2 ns, Eimp=0.8 J was used. A supersonic conical nozzle with dcr=450 μm, 2α=11o, L=5 mm was used to form a pulsed gas jet. The pressure at the nozzle inlet was 25 bar, which corresponds to the developed condensation of molecular gases in gas jets. The spectra were deciphered and the ions emitting under the given experimental conditions were determined. Keywords: gas jets, shock waves, extreme ultraviolet radiation, emission spectra, laser plasma, X-ray spectrometer monochromator.

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