Emission spectra of molecular gases CHF-=SUB=-3-=/SUB=-, CCl-=SUB=-2-=/SUB=-F-=SUB=-2-=/SUB=-, SF-=SUB=-6-=/SUB=- in the range 3-20 nm under pulsed laser excitation using various gas jets as targets

Abstract

The article considers the results of studies of the emission spectra of CHF3, CCl2F2, SF6 upon excitation by pulsed laser radiation. We used Nd : YAG laser, λ = 1064 nm, tau = 5 ns, and Epulse = 0.8 J. The spectral range of 3-20 nm was studied. We used capillary and supersonic conical nozzles with dcrit = 145 μm, 2α = 12o, L = 5 mm, and dcrit = 450 μm, 2α = 11o, L = 5 mm to form an atomic cluster beam. The emission spectra for various gas targets were obtained, the obtained spectra were deciphered, and the ions emitting in this spectral range were determined. We observed that with increasing particle concentration in the zone of laser spark, the radiation intensity increases. In this case, the intensity of ion lines with high degrees of ionization increases faster. Keywords: cluster beams, extreme ultraviolet radiation, emission spectra, laser spark, x-ray spectrometer-monochromator.