Investigation of Self-Heating Effects in UTBB FD-SOI MOSFETs by a Modified Thermal Conductivity Model

Abstract

In this article, an analytical thermal conductivity model considering the degradation caused by the different phonon scattering mechanisms is presented for studying the self-heating effects (SHEs) in ultrathin body and buried oxide (UTBB) silicon-on-insulator (SOI) MOSFETs. By allowing for phonon-boundary and phonon–electron scattering, as well as tuning the surface roughness, the model enables accurate predictions for silicon films of different thicknesses over a wide temperature range. In order to apply the temperature-dependent self-built thermal conductivity model to the technology computer-aided design (TCAD) electrothermal simulation, a piecewise fitting, and equivalent strategy is developed by using the zero points (ZPs) and extreme points (EPs) of the first- and second-order discrete differentials of the model. The results show that the modified model is closer to the experimental data from literature studies than the default TCAD model in predicting the thermal conductivity distribution of the SOI-structure. Furthermore, the TCAD simulation results with our modified model show the same trend as that with its default model in predicting the performance degradation of UTBB SOI devices due to SHEs, such as the degradation of carrier mobility in the channel and the increase of subthreshold swing (SS).