Abstract

A non-contact ultrasonic abrasive machining approach provides a potential solution to overcome the challenges of machining efficiency in the high-precision polishing of optical components. Accurately modeling the material removal distribution (removal function (RF)) and surface morphology is very important in establishing this new computer-controlled deterministic polishing technique. However, it is a challenging task due to the absence of an in-depth understanding of the evolution mechanism of the material removal distribution and the knowledge of the evolution law of the microscopic surface morphology under the complex action of ultrasonic polishing while submerged in liquid. In this study, the formation of the RF and the surface morphology were modeled by investigating the cavitation density distribution and conducting experiments. The research results showed that the material removal caused by cavitation bubble explosions was uniformly distributed across the entire working surface and had a 0.25 mm edge influence range. The flow scour removal was mainly concentrated in the high-velocity flow zone around the machining area. The roughness of the machined surface increased linearly with an increase in the amplitude and gap. Increasing the particle concentration significantly improved the material removal rate, and the generated surface exhibited better removal uniformity and lower surface roughness.

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