Abstract
The investigation deals with determination of thin film refractive index depth profile (inhomogeneity) using the film interference transmittance spectrum only. Barium titanate films deposited at different conditions are studied and a new approach for investigation of the film inhomogeneity is proposed. It is based on transmittance spectra fitting using numerical optimisation methods. Two models for the refractive index variations in the film (linear and non-linear) together with a homogeneous layer model are used to describe the films. The best fit between measurements and calculations is found for the model using quadratic variations of the refractive index in the film.
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