Abstract
We report on the realization of an InGaP-GaAs-based double heterojunction bipolar transistor with high breakdown voltages of up to 85 V using an Al/sub 0.2/Ga/sub 0.8/As collector. These results were achieved with devices with a 2.8 μm collector doped to 6×10/sup 15/ cm/sup -3/ (with an emitter area of 60×60 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ). They agree well with calculated data from a semi-analytical breakdown model. A /spl beta//R/sub SBI/ (intrinsic base sheet resistance) ratio of more than 0.5 by introducing a 150-nm-thick graded Al-content region at the base-collector heterojunction was achieved. This layer is needed to efficiently suppress current blocking, which is otherwise caused by the conduction band offset from GaAs to Al/sub 0.2/Ga/sub 0.8/As. The thickness of this region was determined by two-dimensional numerical device simulations that are in good agreement with the measured device properties.
Published Version
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