Interferometric 3-D displacement measurement using wavefront analysis

Abstract

We propose and demonstrate a novel interferometric technique for 3-D displacement measurement. The method is based on the analysis of the phase difference distribution measured when two coherent curved wavefronts originating from different locations interfere. Both the in-plane and out-of-plane displacements are found simultaneously from a single phase difference distribution. We find that our system could measure with an accuracy better than 1.5 μm for in-plane displacements and 36 μm for out-of-plane displacements over 1 mm range. This accuracy was limited by the output lens performance. Theoretical analysis reveals that sub-micron accuracy may be possible with more careful calibration.