Abstract
An integrated membrane-free sensor for precise measurements of fluid flow rate in microchannels of laboratories-on- chip has been developed. The sensor allows to measure flow on microfluidic chip in real time and is designed for liquid samples precise dilution control on the microfluidic chip. Fabrication technology of the microfluidic chip with built-in flow sensors as well as results of experimental comparison of developed sensor with a commercial flowmeter are presented.
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