Abstract
Based on the principle of differential pressure flow measurement, graphene film was used to measure the differential pressure in the micro channel of microfluidic chip and finally to obtain the micro flow rates. The relationship between differential pressure and flow rate in micro channel was studied and validated by CFD simulation. The fiber F-P cavity using graphene film was fabricated as the pressure sensitive structure, and the relationship between the measured pressure and the optical power output from the pressure sensitive structures was studied. The mechanism model used to measure the micro flow rates in the micro channel of microfluidic chip was established, and a sample of micro flow sensor was fabricated. The relationship between various quantities in the process of converting flow rate to optical power was verified through experiments, and the mechanism model established was verified. The experimental results demonstrate that fabricated sample could achieve accurate measurement of micro flow rate in the micro channel of microfluidic chip.
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