Abstract

Cr-doped BiFeO3 (BFO) thin films were deposited on Pt(200)/TiO2/SiO2/Si(100) substrates by a chemical solution deposition method. The dielectric constant and dissipation factor of the BFO thin films decrease from 165 and 0.054 (undoped) to 100 and 0.02 (3 mol% Cr-doped) at a frequency of 10 kHz as the Cr content increases. The leakage current and ferroelectric properties were improved significantly by means of Cr doping. The leakage current density of 4.1×10−6 A/cm2 for the 3 mol% Cr-doped BFO thin film is about four orders of magnitude lower than that of undoped BFO thin film at an external electric field of 100 kV/cm. The 3 mol% Cr-doped BFO thin film exhibited a well-saturated hysteresis loop with a large remanent polarization (P r) of 61 μC/cm2 at room temperature. The reason for the improved leakage current and ferroelectric properties in Cr-doped BFO thin films can be attributed to the reduced oxygen vacancies in the films by Cr doping. Communicated by Dr. George W. Taylor

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