Abstract
The effect of silicon substrate thickness on the performance of thin film PZT pyroelectric detectors is theoretically and experimentally investigated. As the silicon substrate thickness increases, the pyroelectric current responsivity drastically decreases. The current responsivity of a pyroelectric thin film detector with no silicon substrate is about two orders higher than that of a similar detector with 450 μm thick silicon substrate. To verify the theoretical analysis, micromachined Pb(Zr 0.3Ti 0.7)O 3 (PZT30/70) thin film pyroelectric detectors with different silicon substrate thickness are fabricated and characterised. The experimental results agree well with the theoretical analysis.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
