Abstract
Indium tin oxide films were deposited at different sputtering power on to the glass substrate maintained at a temperature of 648K by fry magnetron sputtering technique. Influence of fry power and annealing, on the structure and growth of ITO film is investigated. A gas sensing unit is designed and the gas sensing properties of the film towards ethanol gas is studied. The X-ray diffraction (XRD) analysis proves the films have preferred crystal growth towards (2 2 2) direction and average size of grains are 57nm. The annealing improved the crystallinitiy and texture of the film. The ITO thin film sensor showed a linear response to ethanol gas in the concentration range of 200 to 1400ppm. Post-deposition annealing of the film at 700K enhanced the response of the sensor.
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