Abstract
Series-connected thin film piezoelectric elements can generate large output voltages. The output voltage ideally is proportional to the number of connections. However, parasitic capacitances formed by the insulation layers and derived from peripheral circuitry degrade the output voltage. Conventional circuit models are not suitable for predicting the influence of the parasitic capacitance. Therefore we proposed the simplest model of piezoelectric elements to perform simulation program with integrated circuit emphasis (SPICE) circuit simulations). The effects of the parasitic capacitances on the thin-film Pb(Zr, Ti)O3, (PZT) elements connected in series on a SiO2 insulator are demonstrated. The results reveal the negative effect on the output voltage caused by the parasitic capacitances of the insulation layers. The design guidelines for the devices using series-connected piezoelectric elements are explained.
Highlights
IntroductionThere has been increasing interest in the healthcare industry for human healthcare monitoring systems
For several decades, there has been increasing interest in the healthcare industry for human healthcare monitoring systems
The calculation using the simulation program with integrated circuit emphasis (SPICE) model has been consistent with the experimental output voltage for the series-connected 8 piezoelectric elements in the previous work [14]
Summary
There has been increasing interest in the healthcare industry for human healthcare monitoring systems. This has led to an increase in research on this topic. Various human-activity monitoring systems have been developed and are commercially available. To realize such monitoring systems, miniaturization and integration of sensors are essential. A small, robust, integrated, wireless, and low-power-consumption sensor system would have a significant impact on patient monitoring in the human-healthcare and wellness industries. Piezoelectric materials have attracted attention for the application of miniature and low-power-consumption sensors [3,4].
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