Abstract
The interdigital electrodes (IDEs) and parallel plate electrodes (PPEs) were prepared by photolithographic techniques and dc sputtering on rf magnetron sputtered lanthanum-modified lead titanate (PLT) films, respectively. The PLT films with IDEs and PPEs exhibit almost the same permittivity at 1kHz, while the dielectric constant and loss of PLT films with IDE decrease faster than those of the films with PPE as increasing the frequency. The permittivity of the films with IDE can be calculated using a previously developed analytical model. The reasons for the impact of the IDE and PPE on dielectric properties of the films were discussed.
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