Influence of air flow rate on structural and electrical properties of undoped indium oxide thin films

Abstract

Using the spray pyrolysis technique thin films of indium oxide were prepared on Corning glass (7059) at a substrate temperature of 425 °C at different flow rates. The electrical and structural properties of these films were studied. The Hall measurements at room temperature showed that the films prepared in an air flow rate of 7 litre min −1 have the highest mobility of 47 cm 2 V −1 s −1 and a minimum resistivity of 1.125 × 10 −3 Ω cm. The X-ray diffraction patterns showed that the films have a preferred orientation of [400] which peaks at the air flow rate of 7 litre min −1.