Abstract
Al 1 − x In x N ternary alloys with solid phase indium compositions between x=0.15 and 0.28 have been grown by metal organic chemical vapor deposition under indium rich conditions within the growth temperature range of 750–810 °C. A thermally activated process with activation energy of 1.05±0.05eV is found to compete with indium incorporation. Smooth epitaxial layers with root mean-squares surface roughness of 0.3–0.8nm are obtained. (Al,In)N films lattice matched to GaN have been introduced into laser diode structures for optical confinement. Optical gain is observed.
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