Independent tuning of frequency and quality factor of microresonators

Abstract

This letter reports on a developed approach to control losses in torsional microresonators for applications that require high precision. This methodology is demonstrated through realizing an array of microresonators with independent tuning of both quality factor and resonant frequency. The presented approach enables both boosting and reducing the quality factor of a resonator using proper drive signals to the tuning electrodes. The experimental data demonstrates a tunability of as much as +33% and −37% from the initial quality factor value with negligible frequency change. On the other hand, fine resonant frequency tuning was achieved with a minimal effect on the quality factor.